“Fabrication of Anodically Bonded CMUT With Vacuum-Sealed Cavities” (2014)
COMSOL Simulation Understanding
⇒ With CMUT simulation with errors in transition from Conventional to Collapsed Mode
Change Material / Parameters as in paper
Use CMUTDE~1.MPH file to find collapse radius
⇒ check what extra parameters do in email
Use collapse-radius value from CMUTDE~1.MPH to find Pressure vs Frequency graph
berthillier_m._dynamic_2011-author.pdf
We consider a generic circular membrane that we will use through all the simulations described in this paper. It is a polysilicon membrane of 1,5 µm thickness and 25 µm radius. The electrode radius is 20 µm and the air gap height is 0,3 µm. Collapse voltage has been calculated to 106 V and the bias voltage Udc is equal to 95 V (90% of the collapse voltage). Alternating voltage Uac is equal to 1 V. Water is the acoustic radiation medium
Calculate necessary resistance and capacitance values for AC and DC connections on ordered CMUT
July 21 : solder parts together + epoxy on gold wires
July 22 : oil immersion experiment