Week 1 - Jun 27 - Jul 6

Chapter 5 notes

Notes on other Papers

Summary

Week 2 - Jul 6 - Jul 13

“Fabrication of Anodically Bonded CMUT With Vacuum-Sealed Cavities” (2014)

COMSOL Simulation Understanding

⇒ With CMUT simulation with errors in transition from Conventional to Collapsed Mode

Week 3 - Jul 13 - Jul 19

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berthillier_m._dynamic_2011-author.pdf

We consider a generic circular membrane that we will use through all the simulations described in this paper. It is a polysilicon membrane of 1,5 µm thickness and 25 µm radius. The electrode radius is 20 µm and the air gap height is 0,3 µm. Collapse voltage has been calculated to 106 V and the bias voltage Udc is equal to 95 V (90% of the collapse voltage). Alternating voltage Uac is equal to 1 V. Water is the acoustic radiation medium

Week 4~Week 6 - Jul 21 - Aug 16