CMUT performance (TX, RX, FBW):

1. larger FBW

   1. pistonCMUT (~150%), classical CMUT (~110%)
   2. due to large f2/f1 frequency ratio

2. improved TX, RX

   1. due to increased electric field intensity

   2. flatter membrane shape allowing larger average membrane displacement and intra-cavity electrostatic pressure

   3. RX:

      1. sensitivity of pistonCMUT 8.25mV/kPa
      2. sensitivity of classical CMUT 4.23mV/kPa

      

   4. TX:

      1. pistonCMUT 5.75 kPa/Vac
      2. classical CMUT 3.15 kPa/Vac

   

3. changing pistonCMUT shape (square, rectangle, tent)

   1. same result as with classical CMUT
   2. device performance optimization by membrane shaping is same for pistonCMUT and for classical CMUT